Wafer Sorter System
在 Jar Box、FOSB 与晶圆盒之间双向完成晶圆识别、对准、分选和搬运。
核心功能
- Dimension: 2,200(W) x 2,000(D) x 1,900(H)mm
- Wafer size: 8" / 12"
- Wafer Carrier: FOSB / Cassette / Jar Box
- Carrier Loading: 12" FOSB Load Port / 8" Cassette Stacker
- Auxiliary material: Interleave paper / Sponge
- Wafer Alignment: Aligner @ Notch Check
- Handling Robot: SCARA / Cartesian Robot
- Lot / ID Management: RFID / OCR
- System Control: PC based @ Win-10
- Host Communication: SECS-GEM
- Electric Power: 220 VAC, 1 Phase, 50/60Hz
- Weight: 2,000kg
- 系统构成
- Jar Box Loading, Wafer ID Reader, Wafer Aligner, SCARA/Cartesian Handling Robot, FOSB/Cassette Loading & Unloading Stacker