Wafer UV Inspection System
UV vision inspection system for the sawing line. It handles wafer rings automatically and screens sawn wafers for defects, mapping every NG die and presenting it for operator review.
核心功能
- Automated rail, buffer and gripper handling for wafer-ring loading and unloading
- Stage X/Y, vision Z and vacuum control for stable inspection positioning
- UV vision inspection of sawn wafers with defect mapping and operator review
- Integrated expander and marking-unit interlocks
- Recipe-based device control with HMI status monitoring
- 系统构成
- Loading Rail, Buffer, Gripper, Wafer Ring Guide, Stage X/Y, Expander, Vacuum Table, Vision Z, UV Vision, Marking Unit, Mapping & Review, Unloading Rail